| 摘要 |
PROBLEM TO BE SOLVED: To provide a dynamic pressure air bearing system operating stably, by providing a layer consisting of a lubricating material, on one side surface of a shaft and a bearing, so as to prevent a poor sliding in a running-in process. SOLUTION: While the sliding surfaces of a shaft and a bearing are formed of an abrasion-proof material a layer consisting of a lubricating material including a compound composed mainly of perfluoropolyether chain (PEPE chain) is provided on at least one side surface of the shaft or the bearing. As to the sliding surface of the shaft and the bearing, at least the surface part of 5 to 15μm is formed of an abrasion-proof material. When the part is thinner than 5μm, a crack is liable to be generated when the hardness difference with a base is large, and even though the part is made thicker than 15μm, no merit is obtained in the functional aspect. This lubricating material reduces the contact bearing in the running-in process, without generating a malfunction generated when a normal lubricating oil is used, and it can reduce the generating amount of the abrasion per unit time, and it can reduce the generation amount of the abrasion per unit time, and can avoid an abnormal friction. Consequently, the number of the initial poor conditions of a polygon motor can be reduced remarkably.
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