摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle detector whose life is long, which is reliable and whose manufacturing cost is low. SOLUTION: The charged particle detector is a Faraday cup which is used for an isotope specific mass spectrometer or the like, it is constituted partly of at least carbon prepared by burning wood or other granular or cellular organic substances, and a charged particle collection substrate 12 whose substrate surface is a continuous air bubble structure is installed. Air bubbles are in a tubular shape in such a way that they are stretched.
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