| 摘要 |
PROBLEM TO BE SOLVED: To prevent the deterioration of measuring precision while simplifying constitution, cost down and improving handling characteristics. SOLUTION: Two intersection points P1 and P2 are provided between the first and second straight lines L1 and L2 , and between the second and third straight lines L2 and L3 , on an object surface 2 of a measuring object 1, and a known mark 3 is provided at an angle αmade by the first and second straight lines L1 and L2 , an angle β made by the second and third straight lines L2 and L3 and distance g between P1 and P2 , and the mark 3 is imaged on at least a single one-dimensional photosensor 6. When the sensor signal containing distribution of light intensity in the longitudinal direction is outputted from the primary photosensor 6, a calculation unit 9 calculates the positions of the straight lines L1 -L3 of a mark image 3' on the primary photosensor 6 based on the sensor signal. And, based on the calculation results, the position of at least one of the two intersection points P1 and P2 and the inclination of at least one of the straight lines L1 -L3 are calculated. For example, the calculation results are made a reference point of position measurement and a reference line of attitude measurement of the to-be-measured object 1. |
