| 摘要 |
FIELD: instrumentation, mass spectrometry, monitoring of processes going on with liberation of gas phase, for example, in ferrous and non-ferrous metallurgy. SUBSTANCE: proposed mass spectrometer for gas analysis includes chamber of analyzer with ion source and detector, cathode positioned in separate chamber isolated from chamber of analyzer by diaphragm with hole for passage of electrons into chamber of analyzer and evacuation system composed of pump and vacuum joining members connected to chamber of analyzer and chamber with cathode. Evacuation system has magneto- discharge pump connected to chamber with cathode and through it to chamber of analyzer used as above-mentioned pump. Diaphragm has additional holes for evacuation which area is calculated by certain formulas. EFFECT: increased authenticity of gas analysis by enhanced operational stability of gas analyzer and reliability of all elements of spectrometer thanks to elimination of oil films and gun on electrodes and prolonged service life of pump due to decreased influence of gases ejected from electrodes. 1 cl, 1 dwg |
