Temperature gradient sintering furnace

摘要

Apparatus for sintering porous layers, deposited on a temperature-stable wafer, includes: (a) a closed housing (1), through which flushing gas is passed; (b) a temperature resistant base (2) provided, on its top face, with flat depressions (4) for holding wafers; and (c) resistance heating elements (3) located in the base (2). Preferably, the base (2) consists of corundum.