发明名称 Transport- und Uebergabeeinrichtung
摘要 Disclosed is a workpiece conveyor and delivery device for a vacuum processing plant. Workpieces are delivered from one device to another, both devices being located opposite each other and moving in relation to each other. A controllable magnet arrangement is provided on one of the devices. A moveable armature element acts as a holding device for the workpiece on one of the two devices which move in relation to each other, namely the device provided with the magnet arrangement. Magnet arrangement is driven to activate the holding device which can be deactivated for delivery of workpiece.
申请公布号 DE29707683(U1) 申请公布日期 1997.06.26
申请号 DE1997207683U 申请日期 1997.04.28
申请人 BALZERS PROZESS SYSTEME VERTRIEBS- UND SERVICE GMBH, 81245 MUENCHEN, DE 发明人
分类号 B65G47/86;B01J3/02;B65G49/07;C23C14/56;C23C16/54;G11B7/26;H01L21/00;H01L21/677;(IPC1-7):B65G47/74 主分类号 B65G47/86
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