发明名称 Processing complex semiconductors
摘要 A method and charge composition for obtaining Hg 1-x Cd x Te (x 0.2) single crystals and wafers with predetermined properties includes heating a vessel with a charge consisting of high-purity Cd, Hg and Te, and optionally containing indium, in a two-zone furnace in the temperature field 704-715{C; holding it for homogenisation and passing through an axial temperature gradient not exceeding 3{C/cm at a speed of 70-85 m/hour for the purpose of crystallisation. A charge for growing single crystals of A II B VI semiconductive compounds, specifically cadmium telluride, additionally includes in its composition together with cadmium and tellurium one or two elements from the group of sulphur, selenium and zinc. A method of preparing wafers of complex semiconductive materials includes polishing and washing of a group of wafers simultaneously on both sides without adhesive attachment of the wafers. Treatment is carried out in four stages: three polishing stages and one washing stage, in a special device which includes a lower driving polisher (2), an upper polisher (1) offset relative to the lower and freely rotatable, and a separator (3) disposed between them, in the aperture of which the wafers (9) are placed. Treatment of wafers of bulk single crystals, epitaxial structures and complex multi-layer heterostructures of arbitrary shape. As a result of the treatment, wafers have a mirror surface without a mechanically disturbed layer. Methods of fabricating Hg 1-x Cd x Te photosensors are also disclosed.
申请公布号 GB2308356(A) 申请公布日期 1997.06.25
申请号 GB19950025978 申请日期 1995.12.19
申请人 * HEATVISION TECHNICS CORPORATION 发明人 MIKHAIL STEPANOVICH * NIKITIN
分类号 C30B11/00;C30B33/00 主分类号 C30B11/00
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