| 摘要 |
<p>High precision force imparting and/or force (including weight) and displacement measuring/indicating device (200) which includes a multi-dimensional capacitor transducer system (202). The multi-dimensional transducer (202) includes a first capacitive transducer (204) for imparting force or movement and/or detecting force, weight, or position in a first direction and a second capacitive transducer (206) for imparting force or movement and/or detecting force, weight, or position in a second direction. The multi-dimensional transducer (202) may be used to provide in situ imaging in micro-mechanical test systems.</p> |
