发明名称 |
Flow control valve |
摘要 |
<p>An improved flow control valve assembly is disclosed. In one embodiment, the present invention comprises a body assembly having a cavity disposed therein. The body further comprises an inlet passage and an outlet passage to permit a fluid or gas flow into or out of the valve cavity. The inlet and outlet passages include openings into the valve cavity. Disposed between the inlet and outlet openings is a curved surface. A fluid or gas flow is controlled through the valve by incrementally engaging a thin, flexible diaphragm along the curved surface of the body to vary the fluid flow resistance between the diaphragm and curved surface. <IMAGE></p> |
申请公布号 |
EP0780611(A1) |
申请公布日期 |
1997.06.25 |
申请号 |
EP19960308755 |
申请日期 |
1996.12.04 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
KACZOROWSKI, EDWARD M.;MANOFSKY, WILLIAM J. R.;WILMER, MICHAEL E. |
分类号 |
F16K7/16;(IPC1-7):F16K7/16 |
主分类号 |
F16K7/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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