发明名称 Flow control valve
摘要 <p>An improved flow control valve assembly is disclosed. In one embodiment, the present invention comprises a body assembly having a cavity disposed therein. The body further comprises an inlet passage and an outlet passage to permit a fluid or gas flow into or out of the valve cavity. The inlet and outlet passages include openings into the valve cavity. Disposed between the inlet and outlet openings is a curved surface. A fluid or gas flow is controlled through the valve by incrementally engaging a thin, flexible diaphragm along the curved surface of the body to vary the fluid flow resistance between the diaphragm and curved surface. &lt;IMAGE&gt;</p>
申请公布号 EP0780611(A1) 申请公布日期 1997.06.25
申请号 EP19960308755 申请日期 1996.12.04
申请人 APPLIED MATERIALS, INC. 发明人 KACZOROWSKI, EDWARD M.;MANOFSKY, WILLIAM J. R.;WILMER, MICHAEL E.
分类号 F16K7/16;(IPC1-7):F16K7/16 主分类号 F16K7/16
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