| 摘要 |
PURPOSE:To obtain a sensor structure where a weight is formed effectively in a limited space, which can enhance a detection sensitivity of a sensor and whose reliability is high by a method wherein a fixed point is situated in the central part, the weight is situated around the central part and a beam or a film which links the fixed point to the weight is provided. CONSTITUTION:In a capacity-type semiconductor sensor, a fixed point as a reference point of a measuring operation is situated in the central part, a weight 1 is situated around the central part and a beam 2 or a film which links the fixed point 3 to the weight is provided. For example, when an acceleration in an up-and-down direction is exerted in the case of a semiconductor acceleration sensor, a weight part 1 is moved up and down in proportion to its magnitude. A fixed part 3 is fixed to one part 16 of a package via a pedestal 6; a space where the weight can be oscillated is given. Thereby, it is easy to increase a rate of a total area of a chip and its weight to the weight as compared with a conventional case where a fixed point is situated around the chip; a weight required to enhance a detection sensitivity can be made heavier without difficulty. |
