发明名称 |
Optical element for UV transmission |
摘要 |
An optical element composed of a fused silica glass that is the product of a thermally converted polymethylsiloxane precursor, and that is adapted to transmit ultraviolet radiation at wavelengths below 300 nm without undergoing a sudden absorption transition, and a microlithography system employing a lens of such glass. <IMAGE> |
申请公布号 |
EP0780345(A1) |
申请公布日期 |
1997.06.25 |
申请号 |
EP19960119953 |
申请日期 |
1996.12.12 |
申请人 |
CORNING INCORPORATED |
发明人 |
ROSPLOCK, CYNTHIA KAY;SEMPOLINSKI, DANIEL RAYMOND |
分类号 |
G02B1/04;C03B19/14;C03C3/06;C03C4/00 |
主分类号 |
G02B1/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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