| 摘要 |
The gradient functiona ceramic with excellent abrasion resistance and lubricating ability is prepared by the following step. (1) inserting surface-treated ceramic substrate into the heated room in a vacuum state. (2) raising the temperature of ceramic substrate with heating the room up to 900 or 1500 deg.C at the uniform rate of 1 or 15 deg.C per minute. (3) sequentially providing the source of silicon supply like silicone, silicon chloride and that of carbon supply such as methane, ethane, benzene into the ceramic substrate surface ability at least more than 2 times. (4) cooling the temperature of heated room to room temperature at the uniform rate of 5 or 20 deg.C per minute.
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