HARD MEMBER AND ITS PRODUCTION

摘要

PROBLEM TO BE SOLVED: To produce a hard member, having a hard carbon coating film formed on the surface of a hard substrate and hardly peeling the hard carbon coating film from the hard substrate at a low production cost and provide a method for producing the hard member. SOLUTION: This hard member has a hard carbon coating film 22 formed on the surface of a hard substrate 23 and further a modified layer 27 on the surface part of the hard substrate 23 and a noncrystalline part of at least noncrystallized one selected from the group consisting of carbon and nitrogen is present in the modified layer 27. A crystallized crystalline part and the noncrystalline part are mixed in the principal component of the hard substrate. This method for producing the hard member comprises a step for implanting at least one ion selected from the group consisting of the carbon and nitrogen into the surface of the hard substrate 23 and thereby forming the modified layer 27 in the surface part of the hard substrate 23 and a step for forming the hard carbon coating film 22 so as to be brought into contact with the modified layer 27. The ion implantation energy is preferably >=500eV and <=100keV. The amount of the implanted ions is preferably >=5×10<16> ions/cm<2> .