发明名称 |
SUPERCONDUCTING MULTILAYER INTERCONNECTION FORMED OF OXIDE SUPERCONDUCTOR MATERIAL AND METHOD FOR MANUFACTURING THE SAME |
摘要 |
A superconducting multilayer interconnection comprises a substrate having a principal surface, a first superconducting current path of a c-axis orientated oxide superconductor thin film formed on the principal surface of the substrate, an insulating layer on the first superconducting current path, and a second superconducting current path of a c-axis orientated oxide superconductor thin film formed on the insulating layer so that the first and second superconducting current paths are insulated by the insulating layer. The superconducting multilayer interconnection further comprises a superconducting interconnect current path of an a-axis orientated oxide superconductor thin film, through which the first and second superconducting current paths are electrically connected each other. In the superconducting multilayer interconnection, at least one of the first and second superconducting current paths has a step portion and the superconducting interconnect current path is positioned at the step portion so that the interface area between the superconducting current path and the superconducting interconnect current path is enlarged.
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申请公布号 |
CA2084394(C) |
申请公布日期 |
1997.06.24 |
申请号 |
CA19922084394 |
申请日期 |
1992.12.02 |
申请人 |
SUMITOMO ELECTRIC INDUSTRIES, LTD. |
发明人 |
NAKAMURA, TAKAO;INADA, HIROSHI;IIYAMA, MICHITOMO |
分类号 |
H01L23/498;(IPC1-7):H01L39/06;H01L39/24 |
主分类号 |
H01L23/498 |
代理机构 |
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