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发明名称
THIN FILM PHASE TRANSFORMATION MEASURING METHOD AND MEASURING DEVICE
摘要
申请公布号
JPH09166561(A)
申请公布日期
1997.06.24
申请号
JP19950324265
申请日期
1995.12.13
申请人
NEC CORP
发明人
OSHIMA NORIKAZU
分类号
G01N25/02;G01N21/27;G01N27/04;(IPC1-7):G01N25/02
主分类号
G01N25/02
代理机构
代理人
主权项
地址
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