发明名称 PRODUCTION OF SINGLE CRYSTAL AND DEVICE THEREFOR
摘要 PROBLEM TO BE SOLVED: To provide a method for producing a single crystal and a device therefor, capable of easily obtaining a high quailty single crystal by maintaining a large oxygen concentration controlling range in the single crystal in a device for lifting the single crystal by the Czochralski method. SOLUTION: This device for producing a single crystal is constituted by providing a rectifying cylinder 14 concentric circularly surrounding the single crystal lifted vertically upward from a raw material molten liquid M in a crucible 3, a cylindrical lift up chamber 2 for blocking a crystal growing part for lifting and growing the single crystal from the raw material molten liquid M from the outside air, and a means for introducing and flowing down an inert gas arranged at the top end of the lift up chamber 2. In this case, a means 16 for an inert gas introduction with gyration in a direction to a tangent line relative to the circumferences of the circles of the rectifying cylinder 14 and the lift up chamber 2 is provided at the circumference of the circle of the lifting up chamber 2.
申请公布号 JPH09165291(A) 申请公布日期 1997.06.24
申请号 JP19950351098 申请日期 1995.12.14
申请人 KOMATSU ELECTRON METALS CO LTD 发明人 HIRAISHI YOSHINOBU
分类号 C30B15/20;C30B15/00;C30B15/14;C30B29/06;H01L21/208;(IPC1-7):C30B15/20 主分类号 C30B15/20
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