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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH09167815(A)
申请公布日期
1997.06.24
申请号
JP19960306742
申请日期
1996.11.18
申请人
HITACHI LTD
发明人
SOGA TASAO;SAWAHATA MAMORU;SUZUKI TAKAYA;NAMETAKE MASATAKE;NAKANO FUMIO
分类号
H01L21/60;H01L23/29;H01L23/31;(IPC1-7):H01L23/29
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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