SURFACE INSPECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To continuously inspect on-line various kinds of flaws on the surface of sheet-like products such as steel plates or the like continuously manufactured and conveyed. SOLUTION: Reflected light from a steel plate 5 is detected by a regular reflection light detecting part 4 and a scattered reflection light detecting part 4, and polarization image signals of the detected regular reflection light and scattered reflection light are compared by a signal processing part to detect the projecting and recessed flaws of the steel plate 5. Further, the signal processing part processes image signals from three linear array cameras 9a-9c which receive light transmitted through photo detectors 10a-10c of the reflection light detecting part 3 and operates ellipsoparameter to detect the presence of a pattern-like flaw.