| 摘要 |
PROBLEM TO BE SOLVED: To remove coated liquid at a constant width along the fringe part a substrate. SOLUTION: A gate type supporting frame 20 provided while straddling the carrying path on the upstream side of a suction rotary unit and sensors 21a, 21b, 21c for detecting the contact with a substrate W passing below are fixed to the supporting frame 20. When a substrate W is carried to a cleaning station 3 by means of a carrying jig 4, the sensors 21a, 21b, 21c detect at least three point on the outer circumference of disc like substrate. Center of a circumcircle passing through three detected points is then determined and recognized as the center of disc like substrate W. Subsequently, the suction rotary unit is shifted to a position where the center of disc like substrate W is aligned with the center of a chuck 13 in the suction rotary unit and stands by thereat. The substrate W is delivered onto the chuck 13 from a carrier 4 at that position and then the suction rotary unit is shifted to a predetermined position where coated liquid is removed at a constant width from the fringe of substrate W by means of a fringe cleaner 16. |
