WIRE TARGET TYPE ION SPUTTERING,申请号JP19950350669-传众专利搜索

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发明名称	WIRE TARGET TYPE ION SPUTTERING
摘要
申请公布号	JPH09165677(A)	申请公布日期	1997.06.24
申请号	JP19950350669	申请日期	1995.12.13
申请人	M & K:KK	发明人	HARADA KATSUMASA
分类号	C23C14/34;C23F4/00;(IPC1-7):C23C14/34	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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