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发明名称
摘要
申请公布号	JPH09506470(A)	申请公布日期	1997.06.24
申请号	JP19950516148	申请日期	1994.12.08
申请人		发明人
分类号	C23F1/00;B01L3/00;B81B1/00;G01L9/00;H01L21/306;H01L29/84;H01L49/00;(IPC1-7):H01L29/84	主分类号	C23F1/00
代理机构		代理人
主权项
地址

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