STAGE DEVICE AND LINEAR MOTOR AS WELL AS EXPOSURE DEVICE AND DEVICE USING THE STAGE DEVICE

摘要

PROBLEM TO BE SOLVED: To manufacture a driving mechanism optimum for a reticle stage of a scanning type exposure device compact and light weight at low cost by composing a thrust making means as a linear motor having accelerating and decelerating coils and a velocity controlling coil. SOLUTION: A reticle 3 is held on a stage 2 supported on a stage guide 1. Magnets 5 are embedded in a magnet holding board 4 fixed on both sides of the stage 2. A movable part is composed of the stage 2, the reticle 3, the magnet holding board 4 and the magnets 5 integrated with one another. A fixed part is composed of yoke coil units 10 provided on both sides of the movable part. Respective units 10 are formed of a center yoke 6, two each of side yokes 7, one phase velocity controlling coil 8 and plural accelerating and decelerating coils 9. Both fixed part and movable part are assembled so that the magnets 5 on the magnet holding board 4 may be enbedded in the space between the accelerting and decelerating coils 9 and the side yokes 7 in no contact with the elements.