| 摘要 |
PROBLEM TO BE SOLVED: To obtain an angular velocity sensor which excludes the influence of an offset component bag a method wherein respective vibrator widths along the x-axis and the y-axis are made different in such a way that the steady vibration in the x-axis direction of a vibrator is not leaked in the z-axis direction in a non-detection state and a resonance frequency in the x-axis direction is not turned to a resonance frequency in the z-axis direction. SOLUTION: In a sensor element 20, vibrators 21, 22 are provided on an x-y plane so as to protrude in parallel from a base part 23, and a tuning-fork vibrator is formed of the base part 23 and of the vibrators 21, 22. The element 20 makes use of the x-axis face of a crystal, the x-axis and the z-axis of the crystal agree with the x-axis and the z-axis of a vibrating direction, the width direction of the vibrators 21, 22 becomes the x-axis, and their thickness direction becomes the z-axis. A vibrator width wx in the x-axis direction is set at about four times a vibrator width wz in the z-axis direction. In this manner, the width wx ≠ the width wz, and a crystal axis agrees with a vibrating axis. As a result, a difference is generated between a resonance frequency fx and a resonance frequency fz at the vibrators 21, 22, the vibrators are not tuned, and a vibration which is excited in the z-axis direction is not leaked substantially in the z-axis direction. Thereby, it is possible to exclude the influence of an offset component clue to the leak of the vibration in the x-axis direction. |
