| 摘要 |
PROBLEM TO BE SOLVED: To prevent track pitch precision from being deteriorated due to vibration caused by circulation of cooling water of a recording laser light source and the vibration caused when a slider is moved by fixing the slider to a table with vacuum suck. SOLUTION: An adjusting table 9 movable in the direction perpendicular to the movement direction of the slider 5 is provided on the slider 5, and a fine adjusting table 18 movable in the same direction as the moving direction of the slider 5 is provided on the coarse adjusting table 9. An objective lens fine adjusting table 19 capable of moving an objective lens 6 in the direction perpendicular to the movement direction of the slider 5 is connected to the fine adjusting table 18. The coarse adjusting table 9, the fine adjusting table 18 and the objective lens fine adjusting table 19 adjust an irradiation position of exposure light with which an optical disk master disk 2 is irradiated, and air is exhausted from a fixing surface 10 between the slider 5 and the coarse adjusting table 9 through a vacuum piping 11, and the slider 5 is fixed to the fine adjusting table 18 with vacuum suction. |
