LASER ANNEALING METHOD AND LASER ANNEALER,申请号JP19950344494-传众专利搜索

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发明名称	LASER ANNEALING METHOD AND LASER ANNEALER
摘要
申请公布号	JPH09162138(A)	申请公布日期	1997.06.20
申请号	JP19950344494	申请日期	1995.12.04
申请人	SEMICONDUCTOR ENERGY LAB CO LTD	发明人	KUSUMOTO NAOTO;TAKAYAMA TORU;YONEZAWA MASAHITO;YAMAZAKI SHUNPEI
分类号	H01L21/20;H01L21/268;H01L21/304;(IPC1-7):H01L21/268	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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