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发明名称
ROTARY SUBSTRATE DRYER
摘要
申请公布号
JPH09162159(A)
申请公布日期
1997.06.20
申请号
JP19950344772
申请日期
1995.12.05
申请人
DAINIPPON SCREEN MFG CO LTD
发明人
SHIMA YASUMASA;SHIMOMURA TATSUMI
分类号
H01L21/304;(IPC1-7):H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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