SENSITIVE ELEMENT FOR GAS ANALYSIS

摘要

FIELD: gas analysis, analysis of chemical composition of atmosphere. SUBSTANCE: proposed sensitive element for gas analysis has pyroelectric detector and element heating detector. Pyroelectric detector is made from pyroelectric material with film electrodes deposited on its both sides and is provided with substrate connected to one of electrodes by forces of molecular adhesion. Heating element is manufactured in the form of conductive film deposited on side of substrate opposite to detector. Thermal diffusivity of α of material of substrate, its thickness L and frequency f of periodic heating are tied up by relation. For further increase of sensitivity sensitive element is additionally provided with plate made from solid material having thickness not less than 0.5 mm located on side of detector at distance not more than 10.0 mm from the latter. One of faces of plate faces detector. Given sensitive element makes it possible to reach hydrogen detection limit 0.5-10.0% and methane detection limit 2.5-25.0%. It also has higher physical and mechanical strength and enhanced noise immunity. EFFECT: enhanced noise immunity and physical and mechanical strength.