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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH09162291(A)
申请公布日期
1997.06.20
申请号
JP19950344986
申请日期
1995.12.06
申请人
RICOH CO LTD
发明人
ISOBE RYUTA
分类号
H01L21/3205;H01L21/31;H01L21/316;H01L21/318;H01L21/768;H01L23/522;(IPC1-7):H01L21/768;H01L21/320
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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