| 摘要 |
PROBLEM TO BE SOLVED: To provide a small-sized, inexpensive, and high-performance control unit in quantities by solving defects such as the size increase, non- massproductivity, non-economization, and restrictions of fast driving of elements due to individual component constitution that a piezoelectric driving optical mirror has. SOLUTION: This device consists of a movable part 4 having a mirror surface 3 composed of a conductor or semiconductor supported on >=2 couple of beams 5 extending from an anchor 6, an inter-digital electrode couple 8 which are united with the anchor 6 and formed of a conductor or semiconductor, a tip- spherical fiber 11 which has lens operation at its front end, and a V groove 10a where the tipspherical fiber 11 is fixed. In this case, the movable part 4, comb-line electrode couple 8, and V groove 10a are formed on the same substrate 10 and the tip-spherical fiber 11 is arranged so that the mirror surface 3 of the movable part 4 is at the beam waist position formed through the lens operation. |
