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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH09162358(A)
申请公布日期
1997.06.20
申请号
JP19950321530
申请日期
1995.12.11
申请人
TOSHIBA CORP
发明人
MIYAGAWA HIROYUKI
分类号
H01L27/04;H01L21/822;H01L21/8234;H01L27/088;H01L29/78;(IPC1-7):H01L27/04;H01L21/823
主分类号
H01L27/04
代理机构
代理人
主权项
地址
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