| 摘要 |
PROBLEM TO BE SOLVED: To obtain an optimal corrective quantity to correct astigmatism in lens procedures. SOLUTION: The correcting direction to correct astigmatism is found (STEP 1), and scanning is performed in the two directions of the found correcting direction and the direction orthogonal to the correcting direction while changing a focal position to a sample, and bidirectional astigmatic quantities are found (STEP 2), and a corrective quantity by which the found bidirectional astigmatic quantities coincide with each other is found (STEP 3 and 4) in the positional relationship in which a focal position to the sample is the same. Astigmatism is corrected (STEP 5 and 6) by using these correcting direction and corrective quantity. |
