| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer cart capable of freely moving, which comprises a chassis made of pipe material, wheels under the chassis, and a wafer-protective damper and a shower in an upper portion of the chassis. SOLUTION: A cart comprises a chassis made of pipe material, and a horizontal bottom plate is placed above a bump 2 located under the chassis 1. A driving unit and wheels 6 are attached to the lower surface of the bottom plate. The driving unit includes an electric motor and a transmission, and the wheels include a driven wheel 6a and two steerable wheels 6b. A clean chamber 12 is provided in an upper portion of the chassis, and a carriage 15 for a cassette C is provided in a lower part inside the clean chamber 12. A damping material 16 is provided between a shelf and a mounting bracket of the carriage 15. The cart can freely move on the floor in a clean room of a wafer plant. |
