发明名称 VERFAHREN ZUR HERSTELLUNG SAUBERER,ORIENTIERTER CdTe OBERFLÄCHEN
摘要 Chemically-etched and or sputtered CdTe surfaces are exposed to UV excimer laser radiation at a fluence ranging from about 15 to 75 mJ/cm2, followed by either a low temperature (<300 DEG C.) thermal anneal or exposure of the CdTe surface to UV excimer laser radiation at a fluence lower than the threshold fluence. This procedure provides clean, stoichiometric, and well-ordered CdTe surfaces.
申请公布号 DE69219759(D1) 申请公布日期 1997.06.19
申请号 DE1992619759 申请日期 1992.11.06
申请人 HUGHES AIRCRAFT CO., LOS ANGELES, CALIF., US 发明人 ZINCK, JENNIFER J., AGOURA, CA 91301, US;BREWER, PETER D., NEWBURY PARK, CA 91320, US
分类号 C23F1/10;C23C16/02;C23F4/00;C30B29/48;C30B33/00;C30B33/04 主分类号 C23F1/10
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