| 发明名称 |
ACCELEROMETER AND METHOD FOR MAKING SAME |
| 摘要 |
An accelerometer based on single-crystal silicon and including a movable weight (1) connected to a stationary frame (3) via suspension arms (21, 22). The resulting sensor is formed in a stack of two silicon plates (6, 7) provided with abutment (43, 44, 47, 48) and counter-abutment (41, 42, 45, 46) functions for limiting the magnitude of the movements of the movable weight (1). |
| 申请公布号 |
WO9722010(A1) |
申请公布日期 |
1997.06.19 |
| 申请号 |
WO1996FR01968 |
申请日期 |
1996.12.10 |
| 申请人 |
SEXTANT AVIONIQUE;LEFORT, OLIVIER;PEDRAZA-RAMOS, SYLVIE;PRESSET, RENE;GIROUD, PIERRE |
发明人 |
LEFORT, OLIVIER;PEDRAZA-RAMOS, SYLVIE;PRESSET, RENE;GIROUD, PIERRE |
| 分类号 |
G01P15/08;G01P15/12;G01P15/13;G01P15/18;H01L29/84 |
主分类号 |
G01P15/08 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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