| 摘要 |
<p>An accelerometer based on single-crystal silicon and including a movable weight (1) connected to a stationary frame (3) via suspension arms (21, 22). The resulting sensor is formed in a stack of two silicon plates (6, 7) provided with abutment (43, 44, 47, 48) and counter-abutment (41, 42, 45, 46) functions for limiting the magnitude of the movements of the movable weight (1).</p> |
