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发明名称
Gateelektrode und Verfahren zu deren Herstellung
摘要
申请公布号
DE19652070(A1)
申请公布日期
1997.06.19
申请号
DE19961052070
申请日期
1996.12.13
申请人
HYUNDAI ELECTRONICS INDUSTRIES CO., LTD., ICHON, KYOUNGKI, KR
发明人
CHOI, JAE-SUNG, SEONGNAM, KYOUNGKI, KR
分类号
H01L21/28;H01L29/49;H01L29/78;(IPC1-7):H01L21/336;C23C16/24;H01L21/285
主分类号
H01L21/28
代理机构
代理人
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