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发明名称
A method of forming a contact hole in a semiconductor device.
摘要
申请公布号
GB2308232(A)
申请公布日期
1997.06.18
申请号
GB19960026111
申请日期
1996.12.16
申请人
* HYUNDAI ELECTRONICS INDUSTRIES CO., LTD.
发明人
BYUNG SEOK * LEE;EI SAM * JEONG;IL SEOK * SONG;HAE JUNG * LEE
分类号
H01L21/302;H01L21/3065;H01L21/311;H01L21/3213;H01L21/768;H01L21/8242;H01L27/108;(IPC1-7):H01L21/311
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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