发明名称 OPTICAL PELLICLE MEMBRANE TO FRAME ADHESION METHOD
摘要 A 100 %-solids adhesive emulsion for use in mounting an optical pellicle (110) to its frame (116) includes a first component with a resin that is curable according to a free radical curing mechanism, a second component including a fluorocarbon compound, a surfactant, and an initiator. The components are emulsifiable into an adhesive emulsion that includes an effective amount of initiator, between about 0.1 % and 5 % by volume surfactant, between about 2 % and 40 % of the second component, and the remainder being the first component. The first component may include a mercapto-ester polymeric resin and an acrylate monomeric resin. The second component may include a fluorocarbon compound containing an acrylate functional group, such as the fluorinated acrylate monomers pentadecafluorooctylacrylate and octafluoropentylacrylate. Also described is a method for adhering an optical pellicle membrane (110) to a pellicle frame (116) with plural upper planar surfaces.
申请公布号 EP0778804(A1) 申请公布日期 1997.06.18
申请号 EP19950933195 申请日期 1995.09.22
申请人 MICRO LITHOGRAPHY, INC. 发明人 WANG, CHING-BORE;YEN, YSUNG-TSAI
分类号 C08F4/00;C08J5/12;C09J4/02;C09J181/00;G03F1/64;(IPC1-7):B60J1/00 主分类号 C08F4/00
代理机构 代理人
主权项
地址