| 摘要 |
PROBLEM TO BE SOLVED: To obtain an ink jet print head for which an inexpensive driving circuit can be used and which is highly reliable and has high quality and high density by changing the compsn. of a piezoelectric film in a wiring region from the compsn. in a deformation region. SOLUTION: A compsn. adding film 31 is removed by means of etching while a part to be a wiring region afterward is kept remained. Thereafter, in order to crystallize a precursor of a piezoelectric film, the whole base sheet is kept for min at 650 deg.C in oxygen atmosphere from both faces of the base sheet by using an infrared rays radiation source 29 and then, is heated for 1min at 900 deg.C and is left to cool by itself to perform crystallization of a piezoelectric film. By this process, the precursor 24 of the piezoelectric film in the deformation region is crystallized and sintered as an aimed compsn. to be a piezoelectric film 11 with the first compsn. On the other hand, in the wiring region, during this heating process, lead of the compsn. adding film diffuses and dissolved as a solid soln. into the precursor 24 to become a film with a different compsn. 30 being a piezoelectric film with the second compsn. Thereafter, a top driving electrode film 12 is formed on the piezoelectric film 11 and the film 30 with a different compsn. |
