| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultrapure water supply apparatus capable of performing sterilization and washing highly frequency without stopping a making line. SOLUTION: In an ultrapure water supply apparatus equipped with forward piping sending ultrapure water, the ultrapure water return piping 9 connected to the return part of the ultrapure water making apparatus, a large number of connection pipings 11-13 parallely connected across the forward piping and the return piping 9 and water supply pipings 114 -134 branched on the way of the connection pipings 11-13 to supply the ultrapure water to the ultrapure water using devices 17-18, two forward pipings are provided and a confluent part where waters from two forward pipings meet with each other are provided at the position on the upstream side of the connection part of the water supply pipings to respective connection pipings 51 , 52 . Further, a sterilizing soln. supply device 6 selecting either one of two forward pipings 51 , 52 to supply a sterilizing soln. in place of ultrapure water and a water passing selection means changing over the passage of the sterilizing soln. and the ultrapure water from these forward pipings to respective pipings are provided. |
