发明名称 |
DETECTOR FOR REFLECTING ELECTRON RAY |
摘要 |
PURPOSE:To enable the test piece image with a good quality and S/N, by detecting the reflecting electrons from the test piece with high efficiency and high accuracy, thru the formation of the detecting surface of the semiconductor detector opposingly provided to the test piece as the spherical or circular cone shape. |
申请公布号 |
JPS52155962(A) |
申请公布日期 |
1977.12.24 |
申请号 |
JP19760072265 |
申请日期 |
1976.06.21 |
申请人 |
NIPPON TELEGRAPH & TELEPHONE |
发明人 |
MATSUDA KOREHITO;KIEN KAORU;TAKAMOTO KIICHI |
分类号 |
G01T1/24;H01J37/244 |
主分类号 |
G01T1/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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