CHEMICAL FILTER FOR PURIFYING GAS AND ITS MANUFACTURE

摘要

PROBLEM TO BE SOLVED: To provide a chemical filter for purifying gas in which performance is high and pressure drop is small and contaminant scarecely generates from the chemical filter itself. SOLUTION: The chemical filter for purifying gas is manufactured by a sheet-manufacturing method by using ion exchange fiber and fibrous active carbon together with glass fiber it necessary. The chemical filter may be manufactured by mixing these fibers and manufacturing sheets from the mixture or by individually manufacturing sheets and thereafter laminating the sheets. Pure water in which specific resistance exceeds 1MΩcm is desirably used for manufacturing sheets. A special limit is eliminated in a method for manufacturing sheets. Substance generating dust is less in comparison with a nonwoven fabric filter produced in a dry method. Since the manufacture is completed with a small amount of binder, the rate of used available ingredients is high. The chemical filter is durable for use of a long period or pressure drop is made small. The chemical filter is safely used for the circulation system of a clean room.