VACUUM VAPOR-PHASE REACTOR AND TREATMENT OF ITS WASTE GAS

摘要

PROBLEM TO BE SOLVED: To decontaminate a cleaning gas such as gaseous ClF3 and to easily clean a reaction chamber without using a dry decontaminator in a vacuum vapor-phase reactor using a water-sealed pump, with respect to the vacuum vapor-phase reactor and the treatment of its waste gas. SOLUTION: In the vacuum vapor-phase reactor having a mechanism for feeding gaseous ClF3 to remove the reaction product depositing in a reaction chamber 1, a water-sealed pump 10 with at least the impeller, side plate and intermediate wallboard formed with a corrosion-resistant metallic material such as stainless steel and Ni-base metal is provided in a gas exhaust pipe 6 after the mechanical booster pump 7 to discharge air, and the gaseous CIF3 and gasified reaction product are decontaminated.