HOLDING TOOL USED FOR POLISHING WORKPIECE AND ITS MANUFACTURE

摘要

PROBLEM TO BE SOLVED: To facilitate the maintenance of an apparatus and also to improve the flatness after polished of a workpiece by shortening working time relating to the holding of a workpiece by an easily attaching and detaching method to eliminate the damage to an apparatus used for holding a workpiece due to a polishing liquid. SOLUTION: This tool is a holding tool 8 of a workpiece 7 to bring the worked surface of the workpiece 7 into sliding contact with a polishing pad 11 provided on a polishing plate 10. The holding tool 8 comprises a base board 1 composed of porous ceramic for attract the workpiece 7 on its surface by attraction from its rear, a seal part 2 provided in the peripheral part of the base board 1. a retainer ring 4 fitted to the base board 1 on the outside of the periphery of the workpiece 7 to prevent the outer end part of the workpiece 7 from sagging due to polishing and a backup ring 5 provided between the retainer ring 4 and the base board 1 to press the retainer ring 4 against the opposed polishing pad 11 side.