PROCESS FOR PRODUCING A SPEED OF ROTATION CORIOLIS SENSOR
摘要
A process for the manufacture of a Coriolis rate-of-rotation sensor with oscillatory support masses spring-suspended on a substrate as well as driving means for the excitation of the planar oscillation of the oscillating masses and evaluation means for the determination of a Coriolis acceleration. Oscillating masses, driving means and integrated stops are structured in a common operation by means of plasma etching from a silicon-on-insulator (SOI) wafer.
申请公布号
WO9715066(A3)
申请公布日期
1997.06.12
申请号
WO1996DE01969
申请日期
1996.10.17
申请人
ROBERT BOSCH GMBH;MUENZEL, HORST;LAERMER, FRANZ;OFFENBERG, MICHAEL;SCHILP, ANDREA;LUTZ, MARKUS
发明人
MUENZEL, HORST;LAERMER, FRANZ;OFFENBERG, MICHAEL;SCHILP, ANDREA;LUTZ, MARKUS