Lithium borosilicate bonding glass

摘要

A bonding glass, for anodic bonding of silicon components to glass components, consists of a lithium borosilicate glass which preferably contains 0.5-15 wt.% Li2O and less than 1.9 wt.% total Fe and/or Ti dopants in the form of FeO, Fe2O3 and Ti2O3. Also claimed is a method of anodic bonding of silicon components to glass components using the above bonding glass component, in which the components are brought into contact, heated at 200-290 deg C, depending on the electrical and/or electrically conductive layers and the bonding voltage, and subjected to a direct voltage of 100-5000 V depending on the glass component thickness of a few microns to a few millimetres. Preferably, the glass has the composition (by wt.) 65-87% SiO2, 9-25% B2O3, 1-5% Al2O3, 0.5-15% Li2O, 0-4% Na2O, 0-2% K2O, 0.2-1.5% FeO and 0-1.5% reducing agents.