Verfahren zur Verwendung von Halogenkarbonsäuren als Reinigungsmittel bei der Herstellung integrierter Schaltkreise,申请号DE19926019547-传众专利搜索

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发明名称	Verfahren zur Verwendung von Halogenkarbonsäuren als Reinigungsmittel bei der Herstellung integrierter Schaltkreise
摘要
申请公布号	DE69219547(D1)	申请公布日期	1997.06.12
申请号	DE19926019547	申请日期	1992.10.08
申请人	AIR PRODUCTS AND CHEMICALS, INC., ALLENTOWN, PA., US	发明人	ROBERTS, DAVID ALLEN, CARLSBAD, CA 92009, US;IVANKOVITS, JOHN CHRISTOPHER, ALLENTOWN, PA 18102, US;BOHLING, DAVID ARTHUR, EMMAUS, PA 18049, US
分类号	C11D7/02;C11D7/08;C11D7/28;C11D11/00;C23G5/00;H01L21/304;H01L21/306;H01L21/3105;H05K3/26;(IPC1-7):H01L21/306	主分类号	C11D7/02
代理机构		代理人
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