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发明名称
SEMI-INSULATING WAFER
摘要
申请公布号
EP0777911(A1)
申请公布日期
1997.06.11
申请号
EP19960923583
申请日期
1996.06.28
申请人
HARRIS CORPORATION
发明人
BEGLEY, PATRICK, A.;RIVOLI, ANTHONY;BAJOR, GYORGY;LOWTHER, REX, E.
分类号
H01L21/762;(IPC1-7):H01L21/762;H01L21/314
主分类号
H01L21/762
代理机构
代理人
主权项
地址
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