| 发明名称 |
Method of curing hydrogen silsesquioxane resin by electron beam to convert it to a silica containing ceramic coating |
| 摘要 |
<p>A method of forming a silica-contg. ceramic coating on a substrate comprises: (a) applying a coating comprising hydrogen silsesquioxane resin (HSR) on a substrate; and (b) exposing the coated substrate to an electron beam for sufficient time and with a sufficient dose to convert the HSR coating to a silica-contg. ceramic coating.</p> |
| 申请公布号 |
EP0778612(A2) |
申请公布日期 |
1997.06.11 |
| 申请号 |
EP19960119378 |
申请日期 |
1996.12.03 |
| 申请人 |
DOW CORNING CORPORATION;NATIONAL SEMICONDUCTOR CORPORATION |
发明人 |
CAMILLETTI, ROBERT CHARLES;SAADAT, IRFAN;THOMAS, MICHAEL |
| 分类号 |
C04B41/00;C04B41/87;B05D3/06;C01B33/12;C04B35/14;C04B41/45;C04B41/50;C08J3/28;C09D183/04;H01L21/312;H01L21/316;(IPC1-7):C04B41/00 |
主分类号 |
C04B41/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
