摘要 |
A process for preparing a thin film of (BaxSr1-x)TiO3 is provided, which comprises adding to a solvent represented by formula (I-A) R1'OR2OH (I-A) wherein R1' represents an aliphatic hydrocarbon group having two or more carbon atoms; and R2 represents a divalent aliphatic hydrocarbon group, two metallic alkoxide compounds represented by the formulae (II) and (III) or three metallic alkoxide compounds represented by formulae (II) to (IV): Ba(OR3)2 (II) Ti(OR4)4 (III) Sr(OR5)2 (IV) wherein R3, R4 and R5 each represent an aliphatic hydrocarbon group, to make mixture, heating the mixture, applying the resulting mixture to a substrate to form a thin film, and then subjecting the material to heat treatment.
|