发明名称 Process for preparing a thin ferroelectric or para-dielectric oxide film
摘要 A process for preparing a thin film of (BaxSr1-x)TiO3 is provided, which comprises adding to a solvent represented by formula (I-A) R1'OR2OH (I-A) wherein R1' represents an aliphatic hydrocarbon group having two or more carbon atoms; and R2 represents a divalent aliphatic hydrocarbon group, two metallic alkoxide compounds represented by the formulae (II) and (III) or three metallic alkoxide compounds represented by formulae (II) to (IV): Ba(OR3)2 (II) Ti(OR4)4 (III) Sr(OR5)2 (IV) wherein R3, R4 and R5 each represent an aliphatic hydrocarbon group, to make mixture, heating the mixture, applying the resulting mixture to a substrate to form a thin film, and then subjecting the material to heat treatment.
申请公布号 US5637346(A) 申请公布日期 1997.06.10
申请号 US19940325600 申请日期 1994.10.19
申请人 FUJI XEROX CO., LTD. 发明人 MORIYAMA, HIROAKI;NASHIMOTO, KEIICHI
分类号 C03C17/25;C03C17/34;C23C18/12;(IPC1-7):B05D5/12 主分类号 C03C17/25
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